More than 200 people connected to the cult were arrested in the attack's aftermath, with 13 sentenced to death and others receiving life imprisonment.
Some of the Aum's victims said it would be hard to simply move on.
There are four remaining members on death row.
The doomsday cult at its peak claimed to have approximately 40,000 members across Japan and Russian Federation, and now is survived in multiple splinter groups that are heavily monitored by authorities.
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One man who was injured in the subway attack, said that the "world had become slightly brighter" after the news.
The 1995 sarin attackers on Tokyo's subway have been executed today, reports public broadcaster NHK.
The Aum's 1995 sarin attack on the Tokyo subway during rush hour killed 13 people and injured thousands more.
Commuters struggled to breathe, their eyes watered and some fell to the ground foaming at the mouth and with blood streaming from their noses.
Japan has faced persistent global criticism for its death penalty.
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"I think we can't avoid capital punishment for those who have committed extremely heinous crimes", Kamikawa said.
After the attack, authorities raided the cult's headquarters in the foothills of Mount Fuji and found a plant capable of making enough sarin to kill millions of people.
Aum members have also been convicted of an additional sarin attack in the town of Matsumoto the year before the Tokyo attack, as well as the murder of an anti-cult lawyer and his family.
In the year 2000 Asahara was disowned officially, but only to rename it as Aleph.
Asahara, whose original name was Chizuo Matsumoto, founded Aum Shinrikyo in 1984.
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The executions came after the last appeals held in January.